Title: As-deposited superconducting thin-films by electron-cyclotron resonance-assisted laser ablation for application in microelectronics
Authors: Deneffe, K
Vanmieghem, P
Brijs, B
Vandervorst, Wilfried
Mertens, R
Borghs, Gustaaf #
Issue Date: Sep-1991
Publisher: Japan j applied physics
Series Title: Japanese journal of applied physics part 1-regular papers short notes & review papers vol:30 issue:9A pages:1959-1963
Abstract: A method for the growth of as-deposited superconducting thin films which combines YAG-laser ablation and oxidation by an electron cyclotron resonance (ECR)-excited oxygen plasma is described. It is demonstrated by depositions on YSZ and SrTiO3 substrates that this one-step method is compatible with the requirements of large surface homogeneity, low substrate temperature and low oxygen partial pressure. The method is therefore well suited for applications in micro-electronics.
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Nuclear and Radiation Physics Section
# (joint) last author

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