Title: Dependence of damage and strain on the temperature of si irradiation in epitaxial ge0.10si0.90 films on si(100)
Authors: Lie, Dyc ×
Song, Jh
Vantomme, André
Eisen, F
Nicolet, Ma
Theodore, Nd
Carns, Tk
Wang, Kl #
Issue Date: Mar-1995
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:77 issue:6 pages:2329-2338
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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