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Title: Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films
Authors: Cannaerts, M
Chamirian, Oxana
Maex, Karen
Van Haesendonck, Christian #
Issue Date: Apr-2002
Publisher: Iop publishing ltd
Series Title: Nanotechnology vol:13 issue:2 pages:149-152
Abstract: We have implemented a thermal mapping technique, scanning Joule expansion microscopy, with a high spatial resolution (about 20 nm) in order to investigate heat generation and dissipation in mesoscopic thin-film structures. In particular, we investigated narrow cobalt-nickel silicide lines having a granular morphology. We are able to directly visualize heating of the silicide in between the grains due to a local increase of the resistance, resulting in current crowding. The increase in resistance can be associated with a local reduction of the silicide thickness in between the larger grains. On the other hand, an enhanced silicide resistivity at grain boundaries may also contribute to the resistance changes.
ISSN: 0957-4484
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Solid State Physics and Magnetism Section
# (joint) last author

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