ITEM METADATA RECORD
Title: Insitu grown or solid-phase recrystallized p-doped monosilicon and polysilicon by rf plasma cvd
Authors: Baert, K
Deschepper, P
Pattyn, Hugo
Rodriguez, A
Nijs, Johan
Mertens, R
Issue Date: Jan-1990
Publisher: Elsevier science sa lausanne
Series Title: Thin solid films vol:184 pages:139-146
URI: 
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
ESAT - ELECTA, Electrical Energy Computer Architectures

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