Title: Preparation of epitaxial films of the transparent conductive oxide Al:ZnO by reactive high-pressure sputtering in Ar/O2 mixtures
Authors: Van Gompel, M ×
Conings, B
Monroy, K. L. Jimenez
D'Haen, J
Gilissen, K
D'Olieslaeger, M
Van Bael, M. K
Wagner, Patrick Hermann #
Issue Date: 2013
Publisher: Wiley-VCH Verlag GMBH
Series Title: Physica Status Solidi A, Applications and Materials Research vol:210 issue:5 pages:1013-1018
ISSN: 1862-6300
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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