Title: The analysis of a thin SiO2/Si3N4/SiO2 stack: A comparative study of low-energy heavy ion elastic recoil detection, high-resolution Rutherford backscattering, and secondary ion mass spectrometry
Authors: Brijs, B ×
Sajavaara, T
Giangrandi, Simone
Janssens, T
Conard, T
Arstila, Kai
Nakajima, K
Kimura, K
Bergmaier, A
Dollinger, G
Vantomme, André
Vandervorst, Wilfried #
Issue Date: Aug-2006
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:249 pages:847-850
Abstract: The analysis of thin films in the range of 10 nm and less has become very important in microelectronics. The goal of this article is an evaluation of low-energy TOF-ERDA (time-of-flight elastic recoil detection analysis) in comparison with low-energy SIMS (secondary ion mass spectrometry) and HRBS (high-resolution Rutherford backscattering spectrometry), using a thin SiO2/Si3N4/SiO2 stack as a test vehicle. Comparisons are made on the depth resolution, its loss as a function of depth and the quantification accuracy. (c) 2006 Elsevier B.V. All rights reserved.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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