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Title: Structural characterization of thin films and multilayer structures
Authors: Temst, Kristiaan ×
Van Bael, Margriet
Baert, M
Rosseel, E
Bruyndoncx, Vital
Strunk, C
Verbanck, G
Mae, K
Van Haesendonck, Christian
Moshchalkov, Victor
Bruynseraede, Yvan
Jonckheere, R
deGroot, DG
Koeman, N
Griessen, R #
Issue Date: Apr-1996
Publisher: Les Editions de physique
Series Title: Journal de Physique IV vol:6 issue:C3 pages:265-270
Abstract: Atomic force microscopy has been used to study the structure, down to the nanoscale, of thin-film and multilayer samples. Due to the fact that atomic force microscopy is not restricted to conducting surfaces, it is possible to image mesoscopic rings, lines, and more complex structures deposited on insulating substrates. X-ray diffraction provides access to the internal structure of the layers, interface roughness and the lateral periodicity of antidot lattices. Comparison of atomic force microscopy and x-ray diffraction on molecular beam epitaxy grown Nb/Cu multilayers shows that high-angle diffraction averages over a lateral length which is in good agreement with the typical grain size.
URI: 
ISSN: 1155-4339
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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