Title: Mushroom microlenses: Optimized microlenses by reflow of multiple layers of photoresist
Authors: Heremans, Paul
Genoe, Jan
Kuijk, M
Vounckx, R
Borghs, Gustaaf #
Issue Date: Oct-1997
Publisher: Ieee-inst electrical electronics engineers inc
Series Title: IEEE Photonics Technology Letters vol:9 issue:10 pages:1367-1369
Abstract: A novel type of photoresist microlenses is conceived. The characteristic of these lenses is their mushroom shape: the lens dome is located at a certain controllable distance from the substrate, and the curvature of the lens is larger than that of traditional truncated-sphere lenses. These mushroom microlenses are equilibrium-state, stable products of reflow that are obtained when starting from a multilayer photoresist stack. Integration on light-emitting diodes results in enhanced output efficiency and directivity: a vertical-to-surface emission enhancement of up to a factor of 8 has been achieved.
ISSN: 1041-1135
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering (ESAT) TC, Technology Campus Diepenbeek
Technologiecluster ESAT Elektrotechnische Engineering
# (joint) last author

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