Title: Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes
Authors: Han, Jeong Hwan ×
Lee, Sang Woon
Choi, Byung Joon
Eom, Taeyong
Kim, Seong Keun
Song, Seul Ji
Lee, Woongkyu
Hwang, Cheol Seong #
Issue Date: 2013
Publisher: Elsevier Pub. Co.
Series Title: Coordination Chemistry Reviews vol:257 issue:23_24 pages:3154-3176
ISSN: 0010-8545
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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