Title: Readying directed self-assembly for patterning in semi-conductor manufacturing
Authors: Gronheid, Roel
Rincon Delgadillo, Paulina
Singh, Arjun
Younkin, Todd
Sayan, Safak
Chan, BT
Van Look, Lieve
Bekaert, Joost
Pollentier, Ivan
Nealey, Paul
Issue Date: 2013
Publisher: Technical Association of Photopolymers, Japan
Series Title: Journal of Photopolymer Science and Technology vol:26 issue:6 pages:779-791
ISSN: 0914-9244
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures

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