|ITEM METADATA RECORD
|Title: ||Readying directed self-assembly for patterning in semi-conductor manufacturing|
|Authors: ||Gronheid, Roel|
Rincon Delgadillo, Paulina
Van Look, Lieve
|Issue Date: ||2013 |
|Publisher: ||Technical Association of Photopolymers, Japan|
|Series Title: ||Journal of Photopolymer Science and Technology vol:26 issue:6 pages:779-791|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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