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Title: Back-channel-etch amorphous indium–gallium–zinc oxide thin-film transistors: The impact of source/drain metal etch and final passivation
Authors: Nag, Manoj
Bhoolokam, Ajay
Steudel, Soeren
Myny, Kris
Maas, Joris
Vaisman Chasin, Adrian
Groeseneken, Guido
Heremans, Paul
Issue Date: 2014
Publisher: Publication Board, Japanese Journal of Applied Physics
Series Title: Japanese Journal of Applied Physics 1, Regular Papers, Short Notes & Review Papers vol:53 issue:11 pages:111401
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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