Title: Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
Authors: Armini, Silvia ×
Loyo Prado, Jana
Krishtab, Mikhail
Swerts, Johan
Verdonck, Patrick
Meersschaut, Johan
Conard, Thierry
Blauw, Michiel
Struyf, Herbert
Baklanov, Mikhaïl #
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:120 pages:240-245
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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