ITEM METADATA RECORD
Title: Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures
Authors: Franco, Jacopo ×
Kaczer, Ben
Groeseneken, Guido #
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:114 pages:47-51
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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