Title: Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Authors: Buhler, Rudolf
Eneman, Geert
Favia, Paola
Bender, Hugo
Vincent, Benjamin
Hikavyy, Andriy
Loo, Roger
Martino, Joao
Claeys, Cor
Simoen, Eddy
Collaert, Nadine
Thean, Aaron
Issue Date: 2014
Publisher: Wiley-VCH
Host Document: Physica Status Solidi C vol:11 issue:11-12 pages:1578-1582
Conference: European-Materials-Research-Society Spring Meeting / Symposium X on Materials Research for Group IV Semiconductors - Growth, Characterization, and Technological Developments location:Lille, FRANCE date:JUL 26-30, 2014
ISSN: 1610-1634
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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