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Title: Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches
Authors: Jiang, Sijia ×
Merckling, Clement
Guo, W
Waldron, Niamh
Caymax, Matty
Vandervorst, Wilfried
Seefeldt, Marc
Heyns, Marc #
Issue Date: 2014
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:115 issue:2
Article number: 23517
Abstract: The evolution of (001) and (111) facets for the epitaxial growth inside submicron trenches is systematically studied in this report. The analysis with the method of “Lagrange multiplier” indicates the equilibrium crystal shape. In the case of non-equilibrium without external fluxes, we employed
the “weighted mean curvature” method to mathematically model the inter-facet migration rate for two extreme kinetic cases: “surface diffusion limited” and “surface attachment/detachment limited.” Coupled with external supply of atoms, the self-limited behavior of facet size is theoretically predicted. Moreover, we find that the self-limited stable facet size in trenches of different widths
has a specific relationship determined by the surface energy ratio, kinetic rate ratio, and isolated growth rate difference. The two limited cases could be discriminated according to the mathematical fitting of one exponent in this relationship based on the stable facet size in trenches of different widths.
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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