Title: Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches
Authors: Jiang, Sijia ×
Merckling, Clement
Guo, W
Waldron, Niamh
Caymax, Matty
Vandervorst, Wilfried
Seefeldt, Marc
Heyns, Marc #
Issue Date: 2014
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:115 issue:2
Article number: 23517
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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