14th International Conference on Atomic Layer Deposition - ALD, Date: 2014/01/01 - 2014/01/06, Location: Kyoto Japan
Publication date:
2014-01-01
Author:
Delabie, Annelies
Jayachandran, Suseendran ; Billen, Arne ; Douhard, Bastien ; Conard, Thierry ; Meersschaut, Johan ; Bender, Hugo ; Demeulemeester, Jelle ; Vandervorst, Wilfried ; Caymax, Matty ; Heyns, Marc