|ITEM METADATA RECORD
|Title: ||Low-k films modification under EUV and VUV radiation|
|Authors: ||Rakhimova, T|
|Issue Date: ||2014 |
|Publisher: ||Institute of Physics and IOP Publishing|
|Series Title: ||Journal of Physics D, Applied Physics vol:47 issue:2 pages:25102|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Non-KU Leuven Association publications|
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