Title: Low-k films modification under EUV and VUV radiation
Authors: Rakhimova, T
Rakhimov, A
Mankelevich, Y.A
Lopaev, D.V
Kovalev, A.S
Vasil'eva, A.N
Zyryanov, S.M
Kurchikov, K
Proshina, O
Voloshin, D.G
Novikova, N.N
Krishtab, Mikhail
Baklanov, Mikhaïl
Issue Date: 2014
Publisher: Institute of Physics and IOP Publishing
Series Title: Journal of Physics D, Applied Physics vol:47 issue:2 pages:25102
ISSN: 0022-3727
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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