Title: As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability
Authors: Tang, Baojun
Croes, Kristof
Barbarin, Yohan
Wang, Yunqi
Degraeve, Robin
Li, Yunlong
Toledano Luque, Maria
Kauerauf, Thomas
Boemmels, Juergen
Tokei, Zsolt
De Wolf, Ingrid
Issue Date: 13-Aug-2014
Publisher: Elsevier
Series Title: Microelectronics Reliability vol:54 issue:9-10 pages:1675-1679
Conference: 25th European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF) location:Berlin: GERMANY date:SEP 29-OCT 02, 2014
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
Department of Materials Engineering - miscellaneous
Structural Composites and Alloys, Integrity and Nondestructive Testing

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