Title: Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O
Authors: Han, Jeong Hwan
Nyns, Laura
Delabie, Annelies
Franquet, Alexis
Van Elshocht, Sven
Adelmann, Christoph
Issue Date: 2014
Publisher: American Chemical Society
Series Title: Chemistry of Materials vol:26 issue:3 pages:1404-1412
ISSN: 0897-4756
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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