Title: Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young’s modulus
Authors: Verdonck, Patrick
Wang, Cong
Le, Quoc Toan
Souriau, Laurent
Vanstreels, Kris
Krishtab, Mikhail
Baklanov, Mikhaïl
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:120 pages:225-229
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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