ITEM METADATA RECORD
Title: Material studies on Si:C epitaxial films grown by CVD
Authors: Dhayalan, Sathish Kumar
Loo, Roger
Rosseel, Erik
Hikavyy, Andriy
Shimura, Yosuke
Nuytten, Thomas
Richard, Olivier
Bender, Hugo
Douhard, Bastien
Vandervorst, Wilfried
Issue Date: Oct-2014
Host Document: SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices vol:64 issue:6 pages:997-1005
Conference: SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices location:Cancun Mexico date:5-10 October 2014
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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