|ITEM METADATA RECORD
|Title: ||Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers|
|Authors: ||Loucif Seiad, Mohamed|
MKuppuswamy, Vijaya Kumar
|Issue Date: ||2014 |
|Conference: ||58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN location:Washington DC USA date:2014-05-27|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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