Title: Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Authors: Loucif Seiad, Mohamed
Singh, Arjun
MKuppuswamy, Vijaya Kumar
Ferhat, Marhoun
Gronheid, Roel
Issue Date: 2014
Conference: 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN location:Washington DC USA date:2014-05-27
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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