Title: Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength
Authors: Neutens, Pieter
Subramanian, Ananth
Mahmud Ul Hasan, Hasan
Chen, Chang
Jansen, Roelof
Claes, Tom
Rottenberg, Xavier
Du Bois, Bert
Leyssens, Kenny
Helin, Philippe
Severi, Simone
Dhakal, Ashim
Peyskens, Frederic
Lagae, Liesbet
Deshpande, Paru
Baets, Roel
Van Dorpe, Pol
Issue Date: 2014
Host Document: Silicon Photonics and Photonic Integrated Circuits IV
Conference: Silicon Photonics and Photonic Integrated Circuits IV location:Brussels Belgium date:2014-04-14
Article number: 91331F
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Solid State Physics and Magnetism Section

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