Title: Dopant/carrier profiling for 3D-structures
Authors: Vandervorst, Wilfried
Schulze, Andreas
Kambham, Ajay Kumar
Mody, Jay
Gilbert, Matthieu
Eyben, Pierre
Issue Date: 2014
Publisher: Wiley-VCH
Host Document: Physica Status Solidi C vol:11 issue:1 pages:121-129
Conference: E-MRS Spring Meeting / Symposium K - Physics and Technology of Advanced Extra Functionality CMOS-based Devices location:Strasbourg, FRANCE date:MAY 27-31, 2013
ISSN: 1610-1634
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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