Title: Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly
Authors: Dubey, Vikas
Van Huylenbroeck, Stefaan
Tutunjyan, Nina
Slabbekoorn, John
De Wolf, Ingrid
Rebibis, Kenneth June
Miller, Andy
Celis, Jean-Pierre
Croes, Kristof
Beyne, Eric
Issue Date: 2014
Host Document: 16th IEEE Electronic Packaging Technology Conference - EPTC pages:579-582
Conference: 16th IEEE Electronic Packaging Technology Conference - EPTC location:Singapore Singapore date:2014-12-03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.