|ITEM METADATA RECORD
|Title: ||Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly|
|Authors: ||Dubey, Vikas|
Van Huylenbroeck, Stefaan
De Wolf, Ingrid
Rebibis, Kenneth June
|Issue Date: ||2014 |
|Host Document: ||16th IEEE Electronic Packaging Technology Conference - EPTC pages:579-582|
|Conference: ||16th IEEE Electronic Packaging Technology Conference - EPTC location:Singapore Singapore date:2014-12-03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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