Title: Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents
Authors: Le, Quoc Toan
Kesters, Els
Devonport, Joshua
Holsteyns, Frank
De Gendt, Stefan
Issue Date: 2014
Publisher: Trans Tech
Host Document: Ultra Clean Processing of Semiconductor Surfaces - UCPSS pages:197-200
Conference: Ultra Clean Processing of Semiconductor Surfaces - UCPSS location:Brussels Belgium date:2014-09-21
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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