|ITEM METADATA RECORD
|Title: ||Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents|
|Authors: ||Le, Quoc Toan|
De Gendt, Stefan
|Issue Date: ||2014 |
|Publisher: ||Trans Tech|
|Host Document: ||Ultra Clean Processing of Semiconductor Surfaces - UCPSS pages:197-200|
|Conference: ||Ultra Clean Processing of Semiconductor Surfaces - UCPSS location:Brussels Belgium date:2014-09-21|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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