Title: Low-leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20nm technology node in dynamic random access memory
Authors: Popovici, Mihaela Ioana
Swerts, Johan
Redolfi, Augusto
Kaczer, Ben
Aoulaiche, Marc
Radu, Iuliana
Clima, Sergiu
Everaert, Jean-Luc
Van Elshocht, Sven
Jurczak, Malgorzata
Issue Date: 2014
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:104 issue:8 pages:82908
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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