Title: High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer
Authors: Nag, Manoj ×
Steudel, Soeren
Bhoolokam, Ajay
Vaisman Chasin, Adrian
Rockele, Maarten
Myny, Kris
Maas, Joris
Fritz, Thomas
Trube, Jutta
Groeseneken, Guido
Heremans, Paul #
Issue Date: 2014
Publisher: Society for Information Display
Series Title: Journal of the Society for Information Display vol:22 issue:1 pages:23-28
ISSN: 1071-0922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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