AVS Topical Conference on Atomic Layer Deposition - ALD, Date: 2014/01/01 - 2014/01/06, Location: Kyoto Japan
Publication date:
2014-01-01
AVS Topical Conference on Atomic Layer Deposition - ALD
Author:
Popovici, Mihaela Ioana
Delabie, Annelies ; Adelmann, Christoph ; Marcoen, Kristof ; Groven, Benjamin ; Swerts, Johan ; Meersschaut, Johan ; Franquet, Alexis ; Redolfi, Augusto ; Jurczak, Malgorzata ; Van Elshocht, Sven