Title: Comparative analysis of the factors leading to low-k degradation during the integration process
Authors: Zotovich, Alexey
Krishtab, Mikhail
Lazzarino, Frederic
Baklanov, Mikhaïl
Issue Date: 2014
Conference: International Conference in Micro- and Nanoelectronics location:Moscow Russia date:2014-10-06
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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