|ITEM METADATA RECORD
|Title: ||Comparative analysis of the factors leading to low-k degradation during the integration process|
|Authors: ||Zotovich, Alexey|
|Issue Date: ||2014 |
|Conference: ||International Conference in Micro- and Nanoelectronics location:Moscow Russia date:2014-10-06|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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