Title: Quantification of group IV alloys in confined structures: the self focusing SIMS approach
Authors: Franquet, Alexis
Douhard, Bastien
Melkonyan, Davit
Delmotte, Joris
Demeulemeester, Jelle
Conard, Thierry
Vandervorst, Wilfried
Issue Date: 2014
Conference: SIMS Europe location:Munster Germany date:2014-09-07
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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