|ITEM METADATA RECORD
|Title: ||Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine|
|Authors: ||Dhayalan, Sathish Kumar|
|Issue Date: ||2014 |
|Conference: ||226th Fall Meeting of the Electrochemical Society location:Cancun Mexico date:2014-10-05|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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