Title: Engineering the IIIV gate stack properties by optimization of the ALD process
Authors: Sioncke, Sonja
Ivanov, Tsvetan
Lin, Dennis
Franco, Jacopo
Vais, Abhitosh
Ameen, Mahmoud
Delabie, Annelies
Xie, Qi
Maes, Jan
Givens, Michael
Tang, Fu
Van Elshocht, Sven
Holsteyns, Frank
Barla, Kathy
Collaert, Nadine
Thean, Aaron
De Gendt, Stefan
Heyns, Marc
Issue Date: 2014
Conference: 226th ECS Fall Meeting location:Cancun Mexico date:2014-10-05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors

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