|ITEM METADATA RECORD
|Title: ||Engineering the IIIV gate stack properties by optimization of the ALD process|
|Authors: ||Sioncke, Sonja|
Van Elshocht, Sven
De Gendt, Stefan
|Issue Date: ||2014 |
|Conference: ||226th ECS Fall Meeting location:Cancun Mexico date:2014-10-05|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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