Title: Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Authors: Krishtab, Mikhail
Vanstreels, Kris
Savage, T
Matsunaga, K
De Gendt, Stefan
Baklanov, Mikhaïl
Issue Date: 2014
Conference: 23rd Materials For Advanced Metallization Conference - MAM location:Chemnitz Germany date:2014-03-02
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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