|ITEM METADATA RECORD
|Title: ||Defects reduction and characterization of epitaxial Si:C/Si:C:P layers grown using cyclic deposition and etching technique|
|Authors: ||Dhayalan, Sathish Kumar|
|Issue Date: ||2014 |
|Conference: ||E-MRS Fall meeting Symposium J: Alternative Semiconductor Integration in Si Microelectronics location:Warsaw Poland date:2014-09-15|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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