Title: Defects reduction and characterization of epitaxial Si:C/Si:C:P layers grown using cyclic deposition and etching technique
Authors: Dhayalan, Sathish Kumar
Loo, Roger
Rosseel, Erik
Hikavyy, Andriy
Shimura, Yosuke
Nuytten, Thomas
Douhard, Bastien
Vandervorst, Wilfried
Issue Date: 2014
Conference: E-MRS Fall meeting Symposium J: Alternative Semiconductor Integration in Si Microelectronics location:Warsaw Poland date:2014-09-15
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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