Title: Molecular glass resists for scanning probe lithography
Authors: Neuber, Christian
Ringk, Andreas
Kolb, Tristan
Wieberger, Floryan
Strohriegl, Peter
Schimdt, Hans-Werner
Fokkema, Vincent
Cooke, Mike
Rawlings, Colin
Durig, Urs
Knoll, Armin
de Marneffe, Jean-Francois
De Schepper, Peter
Kaestner, Marcus
Krivoshapkina, Yana
Budden, Matthias
Rangelow, Ivo
Issue Date: 2014
Host Document: Alternative Lithographic Technologies VI
Conference: Alternative Lithographic Technologies VI location:San Jose, CA USA date:2014-02-23
Article number: 90491V
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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