|ITEM METADATA RECORD
|Title: ||Advanced experimental BEOL stability test: measurements and simulations|
|Authors: ||Vanstreels, Kris|
De Wolf, Ingrid
Van der Plas, Geert
De Vos, Joeri
|Issue Date: ||2014 |
|Host Document: ||Materials for Advanced Metallization Conference - MAM|
|Conference: ||Materials for Advanced Metallization Conference - MAM location:Chemnitz Germany date:2013-03-02|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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