ITEM METADATA RECORD
Title: Advanced experimental BEOL stability test: measurements and simulations
Authors: Vanstreels, Kris
Cherman, Vladimir
Gonzalez, Mario
De Wolf, Ingrid
Van der Plas, Geert
De Vos, Joeri
Boemmels, Juergen
Tokei, Zsolt
Issue Date: 2014
Host Document: Materials for Advanced Metallization Conference - MAM
Conference: Materials for Advanced Metallization Conference - MAM location:Chemnitz Germany date:2013-03-02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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