Title: Ge gate stack passivation for MOS devices: need for atomically controlled processing
Authors: Sioncke, Sonja
Arimura, Hiroaki
Cott, Daire
Franco, Jacopo
Collaert, Nadine
Thean, Aaron
Issue Date: 2014
Conference: JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration location:Leuven Belgium date:2014-11-13
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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