|ITEM METADATA RECORD
|Title: ||Ge gate stack passivation for MOS devices: need for atomically controlled processing|
|Authors: ||Sioncke, Sonja|
|Issue Date: ||2014 |
|Conference: ||JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration location:Leuven Belgium date:2014-11-13|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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