ITEM METADATA RECORD
Title: Watermark formation on bare silicon: Impact of illumination and substrate doping
Authors: Tamaddon, Amir-Hossein
Philipsen, Harold
Mertens, Paul
Holsteyns, Frank
Heyns, Marc
De Gendt, Stefan
van Dorp, Dennis
Issue Date: 2014
Host Document: Ultra Clean Processing of Semiconductor Surfaces XII - UCPSS
Conference: Ultra Clean Processing of Semiconductor Surfaces XII - UCPSS location:Brussels Belgium date:2014-09-21
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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