|ITEM METADATA RECORD
|Title: ||Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine|
|Contributors: ||Dhayalan;Sathish; SATHISH, KUMAR/U0074546|
|Issue Date: ||2007 |
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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