ITEM METADATA RECORD
Title: FEM simulation and measurement validation of a cMUT cell
Authors: Mao, Shengping
Rottenberg, Xavier
Rochus, Veronique
Nauwelaers, Bart
Tilmans, Harrie
Issue Date: 2014
Host Document: 15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE pages:1-7
Conference: 15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE location:Gent Belgium date:2014-04-06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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