Title: Si cap passivation on InGaAs: a route to reduce oxide traps
Authors: Sioncke, Sonja
Nyns, Laura
Vais, Abhitosh
Lin, Dennis
Franco, Jacopo
Bai, Xue
El Kazzi, Salim
Kunert, Bernardette
Porret, Clément
Maurice, Thibaut
Holsteyns, Frank
De Gendt, Stefan
Collaert, Nadine
Heyns, Marc
Thean, Aaron
Issue Date: 2014
Conference: IEEE Semiconductor Interfaces Specialist Conference - SISC location:San Diego, CA USA date:2014-12-10
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Surface and Interface Engineered Materials
Molecular Design and Synthesis
Associated Section of ESAT - INSYS, Integrated Systems

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