Title: Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation
Authors: Mueller, Matthias
Hoenicke, Philipp
Detlefs, Blanka
Fleischmann, Claudia
Vandervorst, Wilfried
Beckhoff, Burkhard
Issue Date: 2014
Conference: NanotechItaly location:Venice Italy date:2014-11-26
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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