Title: Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs
Authors: Nag, Manoj
Muller, Robert
Steudel, Soeren
Smout, Steve
Bhoolokam, Ajay
Vaisman Chasin, Adrian Nelson
Myny, Kris
Cobb, Brian
Schols, Sarah
Genoe, Jan
Kumar, Abhishek
Gelinck, Gerwin
Fukui, Yusuke
Groeseneken, Guido
Heremans, Paul
Issue Date: 26-Aug-2014
Host Document: International Meeting on Information Display - IMID
Conference: International Meeting on Information Display - IMID location:Daegu South Korea date:August 26-29, 2014
Article number: Paper 16-3
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Technologiecluster ESAT Elektrotechnische Engineering
Electrical Engineering (ESAT) TC, Technology Campus Diepenbeek

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