Title: Fabrication and characterization of epitaxial Si-O superlattices
Authors: Jayachandran, Suseendran
Delabie, Annelies
Lin, Dennis
Douhard, Bastien
Richard, Olivier
Meersschaut, Johan
Moussa, Alain
Bender, Hugo
Caymax, Matty
Vandervorst, Wilfried
Heyns, Marc
Issue Date: 2014
Conference: E-MRS Fall Symposium J: Alternative Semiconductor Integration in Si Microelectronics location:Warsaw Poland date:2014-09-15
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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