Title: Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Authors: Zhang, Liping
de Marneffe, Jean-Francois
Lukaszewicz, Mikolaj
Barry-Porter, Stephen
Vajda, Felim
Sun, Yiting
Heyne, Markus
Baklanov, Mikhaïl
Rutiqlian, Vito
Issue Date: 2014
Publisher: AVS
Conference: AVS 61st International Symposium and Exhibition location:Baltimore USA date:2014-11-09
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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