|ITEM METADATA RECORD
|Title: ||Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches|
|Authors: ||Zhang, Liping|
de Marneffe, Jean-Francois
|Issue Date: ||2014 |
|Conference: ||AVS 61st International Symposium and Exhibition location:Baltimore USA date:2014-11-09|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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