Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito

AVS 61st International Symposium and Exhibition, Date: 2014/01/01 - 2014/01/11, Location: Baltimore USA

Publication date: 2014-01-01

Publisher: AVS

Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Author:

Zhang, Liping

de Marneffe, Jean-Francois ; Lukaszewicz, Mikolaj ; Barry-Porter, Stephen ; Vajda, Felim ; Sun, Yiting ; Heyne, Markus ; Baklanov, Mikhaïl ; Rutiqlian, Vito