Title: A fast triple patterning solution with fix guidance
Authors: Fang, Weiping
Arikati, Srini
Celingir, Erdem
Hug, Marco A
De Bisschop, Peter
Mailfert, Julien
Lucas, Kevin
Gao, Weimin
Issue Date: 2014
Host Document: Design-Process-Technology Co-optimization for Manufacturability VIII
Conference: Design-Process-Technology Co-optimization for Manufacturability VIII location:San Jose, CA USA date:2014-02-23
Article number: 90530A
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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