|ITEM METADATA RECORD
|Title: ||Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors|
|Authors: ||Buhler, Rudolf|
|Issue Date: ||2014 |
|Conference: ||E-MRS Spring Meeting Symposium X: Materials Research for Group IV Semiconductors location:Lille France date:2014-05-16|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
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