Title: Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Authors: Buhler, Rudolf
Eneman, Geert
Favia, Paola
Bender, Hugo
Vincent, Benjamin
Hikavyy, Andriy
Loo, Roger
Martino, Joao
Claeys, Cor
Simoen, Eddy
Collaert, Nadine
Thean, Aaron
Issue Date: 2014
Conference: E-MRS Spring Meeting Symposium X: Materials Research for Group IV Semiconductors location:Lille France date:2014-05-16
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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