23rd Conference on Materials for Advanced Metallization - MAM, Date: 2014/01/01 - 2014/01/03, Location: Chemnitz Germany
Publication date:
2014-01-01
Author:
Vakanas, George
O, Minho ; Dimcic, Biljana ; Vandecasteele, Bjorn ; Vanstreels, Kris ; De Messemaeker, Joke ; De Preter, Inge ; Derakhshandeh, Jaber ; Guerrieri, Stefano ; Rebibis, Kenneth June ; La Manna, Antonio ; Kajihara, Masanori ; De Wolf, Ingrid ; Beyne, Eric