Title: Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer deposition
Authors: Ameen, Mahmoud ×
Nyns, Laura
Sioncke, Sonja
Lin, Dennis
Ivanov, Tsvetan
Conard, Thierry
Meersschaut, Johan
Feteha, M. Y
Van Elshocht, Sven
Delabie, Annelies #
Issue Date: 2014
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:3 issue:11 pages:N133-N144
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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